Meter to measure dissolved ozone in liquid (OZL - UI series)
1.Lightweight and compact
Offering separate conversion unit and detection unit in order to easily install in a pipe line. It is very much miniaturized compared to conventional in-line systems.
2.Real-time, in-line measurement
Real time direct measurement of dissolved ozone concentration in the flow of liquid is possible. The original cell is designed to minimize pressure loss and to resist pressure. (pressure resistance: 0.3Mpa).
Ultrasonic densimeter type 1006
1.This ultrasonic densimeter is useful for the monitoring and dilution management of HF concentration and ammonia concentration in a wash tub after CMP process.
2.This compact and lightweight ultrasonic unit allows in-line measurement. Because of the in-line measurement, there is no time lag, and continuous measurement is possible. The part of the unit which has liquid contact is fluorine resin (PFA) offering corrosion resistance.
UPTeCS (Use Point Temperature Control System)
UPTeCS is an epoch-making temperature control system which produces stable temperature at use-point regardless of friction of heat load caused by process equipment.
This is superior to temperature control of a conventional chiller which only controls the output temperature of the liquid from the chiller, not at the use-point.
By giving stable desired temperature at use-point, UPTeCS helps to increase productivity and also saves a lot of time for setting temperature at the time of installation as well as at the time of recipe change.
UPTeCS is also available with multi-channel capability. Because of individual fluid flow in the system, UPTeCS is able to set different temperature for use-point of each channel. This feature gives users great saving of foot space as well as initial cost.